Decompression drying equipment

Decompression drying machine with touch panel control for program operation.
The machine dries glass substrates after resist coating in a decompression chamber by decompression drying.

Product details

Simplified operation by touch panel control.
Program "recipe" operation (enables operating procedures to be reproduced).
Two-stage exhaust for drying with reduced wind patterning and foaming.
Evacuation / vacuum pumping capacity can be set using a butterfly valve.

Remarks

Manufacturer: EHC Co., Ltd.
Other LCD-related equipment is also available.
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